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Shape optimization of a showerhead system for the control of growth uniformity in a MOCVD reactor using CFD-based Evolutionary Algorithms
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T.C. Xenidou, A.G. Boudouvis, N.C. Markatos, N. Prud’homme, L. Aloui and C. Vahlas |
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Publication year: |
2009 |
Language: |
English |
Abstract
A steady state, laminar flow coupled with heat transfer, gas-phase and surface chemistry, is numerically solved for the optimal design of a showerhead gas delivery system in an axis-symmetrical MOCVD reactor. The design method involves an evolutionary algorithm based on CFD simulations. A finite-volume CFD code for aluminum growth provides the ... more |
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